Inventor
Motoya Taniguchi
Inventor
Kamakura, JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices54%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling8%
G02BOptical elements, systems or apparatus8%
G11BInformation storage based on relative movement between record carrier and transducer8%
Y10TTechnical subjects covered by former us classification8%
PatentTitleYear
5,121,449'Information detecting system of scanning type'19924,852,133'X-ray lithography apparatus'19894,803,712'X-ray exposure system'19894,666,291'Light-exposure apparatus'19874,516,254'X-Ray lithographic apparatus'19854,492,356'Precision parallel translation system'19854,475,223'Exposure process and system'19844,403,336'X-Ray exposure apparatus'1983Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1983–1992Patents assigned to HITACHI LTD (8)· patent assignee history
1983–1985Based in Yokohama, JP· patent location history
1985–1992Based in Kamakura, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 8 | 1983–1992 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kamakura, JP | 5 | 1985–1992 |
| Yokohama, JP | 3 | 1983–1985 |