LexDanaLexDanabeta
Inventor

TAKAHISA OTSUKA

Inventor
JP

Overview

3→
Patents
2023–2024
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
B08BCleaning in general20%
B01DSeparation10%
B05BSpraying apparatus10%
PatentTitleYear
11,862,486Substrate liquid processing apparatus, substrate liquid processing method and recording medium202411,769,661Substrate processing method and substrate processing apparatus202311,712,710Substrate processing apparatus and substrate processing method2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023–2024Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2023–2024Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32023–2024
Locations
LocationPatentsSpan
JP32023–2024