Inventor
Remco Dirks
Inventor
Deurne, NL
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices45%
G06FElectric digital data processing18%
G01BMeasuring length, thickness or similar linear dimensions9%
G01NInvestigating or analysing materials by determining their chemical or physical properties9%
H01LSemiconductor devices9%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h109%
PatentTitleYear
10,627,213Statistical hierarchical reconstruction from metrology data202010,592,618Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method202010,151,985Process flagging and cluster detection without requiring reconstruction20188,706,455'Methods and apparatus for calculating electromagnetic scattering properties of a structure using a normal-vector field and for reconstruction of approximate structures'20148,645,109'Methods and apparatus for determining electromagnetic scattering properties and structural parameters of periodic structures'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2020Patents assigned to ASML NETHERLANDS BV (5)· patent assignee history
2014Patents assigned to DIRKS REMCO (2)· patent assignee history
2014Patents assigned to SETIJA IRWAN DANI (2)· patent assignee history
2014Patents assigned to VAN BEURDEN MARTIJN CONSTANT (2)· patent assignee history
2014Patents assigned to VAN KRAAIJ MARKUS GERARDUS MARTINUS MARIA (1)· patent assignee history
2014–2020Based in Deurne, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 5 | 2014–2020 |
| DIRKS REMCOself | 2 | 2014 |
| SETIJA IRWAN DANI | 2 | 2014 |
| VAN BEURDEN MARTIJN CONSTANT | 2 | 2014 |
| VAN KRAAIJ MARKUS GERARDUS MARTINUS MARIA | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Deurne, NL | 5 | 2014–2020 |