Inventor
Tsukasa Azuma
Inventor
Tokyo, JP
Overview
Patents· 30 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
C22CAlloys11%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
B82YSpecific uses or applications of nanostructures6%
C21DModifying the physical structure of ferrous metals6%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%
C22BProduction and refining of metals5%
Y10TTechnical subjects covered by former us classification5%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form3%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems3%
PatentTitleYear
9,797,034'High strength and high toughness cast steel material and method for producing the same'20179,291,908'Method of forming pattern and laminate'20169,108,342'Method of forming film, method of forming pattern, and method of manufacturing semiconductor device'20159,073,284'Method of forming pattern and laminate'20159,040,123'Pattern formation method'20159,034,121'Low alloy steel for geothermal power generation turbine rotor, and low alloy material for geothermal power generation turbine rotor and method for manufacturing the same'20158,999,078'Forging heat resistant steel, manufacturing method thereof, forged parts and manufacturing method thereof'20158,980,755'Method of pattern formation'20158,808,973'Method of forming pattern'20148,609,014'Template manufacturing method, semiconductor device manufacturing method and template'20138,512,488'Ni—Fe based forging superalloy excellent in high-temperature strength and high-temperature ductility, method of manufacturing the same, and steam turbine rotor'20138,119,313'Method for manufacturing semiconductor device'20127,820,098'High Cr ferritic heat resistance steel'20106,846,750'High precision pattern forming method of manufacturing a semiconductor device'20056,576,375'Photomask'20036,279,502'Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor device'20016,096,484'Pattern forming method using chemically amplified resist and apparatus for treating chemically amplified resist'20006,051,369'Lithography process using one or more anti-reflective coating films and fabrication process using the lithography process'20005,998,100'Fabrication process using a multi-layer antireflective layer'19995,879,853'Top antireflective coating material and its process for DUV and VUV lithography systems'19995,879,863'Pattern forming method'19995,866,303'Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor device'19995,815,247'Avoidance of pattern shortening by using off axis illumination with dipole and polarizing apertures'19985,759,746'Fabrication process using a thin resist'19985,716,468'Process for producing high-and low-pressure integral-type turbine rotor'19985,712,698'Independently controllable shutters and variable area apertures for off axis illumination'19985,560,788'Heat resisting steels'19965,524,019'Electrode for electroslag remelting and process of producing alloy using the same'19965,487,082'Electrode for electroslag remelting and process of producing alloy using the same'19965,444,732'Electrode for electroslag remelting and process of producing alloy using the same'1995Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1995–2017Patents assigned to JAPAN STEEL WORKS LTD (10)· patent assignee history
1995–2017Based in Hokkaido, JP· patent location history
1996–2015Based in Muroran, JP· patent location history
1998–2016Patents assigned to TOSHIBA KK (23)· patent assignee history
1998–1999Based in Poughkeepsie, NY, US· patent location history
1999–2005Based in Tokyo, JP· patent location history
2012–2017Patents assigned to AZUMA TSUKASA (9)· patent assignee history
2013–2016Based in Kawasaki, JP· patent location history
2014–2015Patents assigned to ASAKAWA KOJI (2)· patent assignee history
2014–2015Patents assigned to HATTORI SHIGEKI (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOSHIBA KK | 23 | 1998–2016 |
| JAPAN STEEL WORKS LTD | 10 | 1995–2017 |
| AZUMA TSUKASAself | 9 | 2012–2017 |
| ASAKAWA KOJI | 2 | 2014–2015 |
| HATTORI SHIGEKI | 2 | 2014–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 7 | 1999–2005 |
| Hokkaido, JP | 5 | 1995–2017 |
| Muroran, JP | 5 | 1996–2015 |
| Poughkeepsie, New York, US | 5 | 1998–1999 |
| Kawasaki, JP | 4 | 2013–2016 |