Inventor

Maik Stegemann

Inventor

Pesterwitz, DE

Overview

2006–2021

Patent span

Electricity

Primary field (CPC H)

Patents· 27 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B81Cprimary

B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems20%

B81BMicrostructural devices or systems, e.g. micromechanical devices18%

H01LSemiconductor devices13%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h109%

G01LMeasuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure8%

H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%

G01NInvestigating or analysing materials by determining their chemical or physical properties4%

H10DInorganic electric semiconductor devices4%

H10NElectric solid-state devices not otherwise provided for4%

G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light3%

PatentTitleYear

11,078,072Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process2021 10,870,575Stressed decoupled micro-electro-mechanical system sensor2020 10,684,306Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device2020 10,683,203Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process2020 10,681,777Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures2020 10,544,037Integrated semiconductor device and manufacturing method2020 10,386,255Pressure sensor device and manufacturing method2019 10,347,778Graded-index structure for optical systems2019 10,290,805Emitter and method for manufacturing the same2019 10,084,101Graded-index structure for optical systems2018 10,060,816Sensor structures, systems and methods with improved integration and optimized footprint2018 9,896,329'Integrated semiconductor device and manufacturing method'2018 9,887,355'Emitter and method for manufacturing the same'2018 9,752,943'Sensor structures, systems and methods with improved integration and optimized footprint'2017 9,663,355'Method and structure for creating cavities with extreme aspect ratios'2017 9,641,153'Method of forming a resonator'2017 9,546,923'Sensor structures, systems and methods with improved integration and optimized footprint'2017 9,452,923'Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region'2016 9,382,111'Micromechanical system and method for manufacturing a micromechanical system'2016 9,376,314'Method for manufacturing a micromechanical system'2016 9,330,929'Systems and methods for horizontal integration of acceleration sensor structures'2016 9,209,778'Microelectromechanical resonators'2015 9,136,136'Method and structure for creating cavities with extreme aspect ratios'2015 8,962,469'Methods of stripping resist after metal deposition'2015 7,396,749'Method for contacting parts of a component integrated into a semiconductor substrate'2008 7,368,390'Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process'2008 7,141,507'Method for production of a semiconductor structure'2006

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2006–2020Patents assigned to INFINEON TECHNOLOGIES AG (9)· patent assignee history

2006–2008Based in Dresden, DE· patent location history

2015–2020Patents assigned to INFINEON TECHNOLOGIES DRESDEN GMBH (17)· patent assignee history

2015Patents assigned to STEGEMANN MAIK (1)· patent assignee history

2015–2021Based in Pesterwitz, DE· patent location history

2018Patents assigned to INFINEON TECH DESDEN GMBH (1)· patent assignee history

2020–2021Patents assigned to INFINEON TECH DRESDEN GMBH & CO KG (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
INFINEON TECHNOLOGIES DRESDEN GMBH	17	2015–2020
INFINEON TECHNOLOGIES AG	9	2006–2020
INFINEON TECH DRESDEN GMBH & CO KG	2	2020–2021
INFINEON TECH DESDEN GMBH	1	2018
STEGEMANN MAIKself	1	2015

Locations

Location	Patents	Span
Pesterwitz, DE	24	2015–2021
Dresden, DE	3	2006–2008