Inventor
Tal Itzkovich
Inventor
Kfar Veradim, IL
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices26%
H01LSemiconductor devices15%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
G01NInvestigating or analysing materials by determining their chemical or physical properties11%
G06FElectric digital data processing11%
G01BMeasuring length, thickness or similar linear dimensions7%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light4%
G02BOptical elements, systems or apparatus4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
Y10TTechnical subjects covered by former us classification4%
PatentTitleYear
10,579,768Process compatibility improvement by fill factor modulation202010,527,951Compound imaging metrology targets202010,303,835Method and apparatus for direct self assembly in target design and production201910,203,200Analyzing root causes of process variation in scatterometry metrology20199,903,711'Feed forward of metrology data in a metrology system'20189,476,838'Hybrid imaging and scatterometry targets'20169,093,458'Device correlated metrology (DCM) for OVL with embedded SEM structure overlay targets'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2020Patents assigned to KLA TENCOR CORP (7)· patent assignee history
2015Patents assigned to AMIR NURIEL (1)· patent assignee history
2015Patents assigned to CHOI DONGSUB (1)· patent assignee history
2015Patents assigned to ITZKOVICH TAL (1)· patent assignee history
2015Patents assigned to KANDEL DANIEL (1)· patent assignee history
2015–2020Based in Kfar Veradim, IL· patent location history
2019Based in Kfar Sava, IL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 7 | 2015–2020 |
| AMIR NURIEL | 1 | 2015 |
| CHOI DONGSUB | 1 | 2015 |
| ITZKOVICH TALself | 1 | 2015 |
| KANDEL DANIEL | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kfar Veradim, IL | 6 | 2015–2020 |
| Kfar Sava, IL | 1 | 2019 |