Inventor
Salam Harb
Inventor
Los Gatos, CA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices18%
Y10TTechnical subjects covered by former us classification18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
H01JElectric discharge tubes or discharge lamps11%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form7%
C22CAlloys7%
G01NInvestigating or analysing materials by determining their chemical or physical properties7%
G02BOptical elements, systems or apparatus7%
B08BCleaning in general4%
F04DNon-positive-displacement pumps4%
PatentTitleYear
10,953,441System and method for cleaning optical surfaces of an extreme ultraviolet optical system20219,879,684'Apparatus and method for shielding a controlled pressure environment'20189,874,512Method and system for gas flow mitigation of molecular contamination of optics20189,141,002'Z-stage with dynamically driven stage mirror and chuck assembly having constraint'20158,664,594'Electron-optical system for high-speed and high-sensitivity inspections'20148,390,789'Z-stage with dynamically driven stage mirror and chuck assembly'20138,169,768'Electrostatic chuck'20128,092,927'Shielding, particulate reducing high vacuum components'20127,919,193'Shielding, particulate reducing high vacuum components'20117,800,735'Z-stage with dynamically driven stage mirror and chuck assembly'20107,566,873'High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2013Patents assigned to KLA TENCOR TECH CORP (3)· patent assignee history
2009–2021Based in Los Gatos, CA, US· patent location history
2011–2021Patents assigned to KLA TENCOR CORP (8)· patent assignee history
2012–2014Patents assigned to HARB SALAM (4)· patent assignee history
2012–2014Patents assigned to TAHMASSEBPUR MOHAMMED (3)· patent assignee history
2012–2014Patents assigned to HAN LIQUN (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 8 | 2011–2021 |
| HARB SALAMself | 4 | 2012–2014 |
| KLA TENCOR TECH CORP | 3 | 2009–2013 |
| TAHMASSEBPUR MOHAMMED | 3 | 2012–2014 |
| HAN LIQUN | 2 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Los Gatos, California, US | 11 | 2009–2021 |