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Inventor

ANJANA M. PATEL

Inventor
US

Overview

4→
Patents
2023–2025
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material25%
H01JElectric discharge tubes or discharge lamps25%
B08BCleaning in general17%
H01LSemiconductor devices17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
PatentTitleYear
12,488,981Systems and methods for deposition residue control202511,948,790Heater support kit for bevel etch chamber202411,699,577Treatment for high-temperature cleans202311,560,623Methods of reducing chamber residues2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023–2025Patents assigned to APPLIED MATERIALS INC (4)· patent assignee history
2023–2025Based in US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
APPLIED MATERIALS INC42023–2025
Locations
LocationPatentsSpan
US42023–2025