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Inventor

Paulus H. C. M. Schapendonk

Inventor
Heeze, NL

Overview

2→
Patents
2003–2006
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H02KDynamo-electric machines50%
PatentTitleYear
7,057,313'Cooling of voice coil motors'20066,657,204'Cooling of voice coil motors in lithographic projection apparatus'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003–2006Patents assigned to ASML NETHERLANDS BV (2)· patent assignee history
2003–2006Based in Heeze, NL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV22003–2006
Locations
LocationPatentsSpan
Heeze, NL22003–2006