Inventor
Heiko Weichert
Inventor
Utzberg, DE
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Bprimary
G01BMeasuring length, thickness or similar linear dimensions23%
G01NInvestigating or analysing materials by determining their chemical or physical properties23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices15%
G06FElectric digital data processing8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
PatentTitleYear
8,346,506'Transforming metrology data from a semiconductor treatment system using multivariate analysis'20137,884,950'Substrate processing method, program, computer-readable storage medium, and substrate processing system'20117,639,370'Apparatus for deriving an iso-dense bias'20097,598,099'Method of controlling a fabrication process using an iso-dense bias'20097,445,446'Method for in-line monitoring and controlling in heat-treating of resist coated wafers'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2013Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2008–2013Based in Utzberg, DE· patent location history
2011Based in Dresden, DE· patent location history
2013Patents assigned to BAO JUNWEI (1)· patent assignee history
2013Patents assigned to CHEN YAN (1)· patent assignee history
2013Patents assigned to EGRET SEBASTIEN (1)· patent assignee history
2013Patents assigned to VUONG VI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2008–2013 |
| BAO JUNWEI | 1 | 2013 |
| CHEN YAN | 1 | 2013 |
| EGRET SEBASTIEN | 1 | 2013 |
| VUONG VI | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Utzberg, DE | 4 | 2008–2013 |
| Dresden, DE | 1 | 2011 |