Inventor
Hidehito Obayashyi
Inventor
Burlingame, CA, US
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
4,701,940'Linearly polarized X-ray patterning process'1987Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1987Patents assigned to HITACHI LTD (1)· patent assignee history
1987Based in Burlingame, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 1 | 1987 |
Locations
| Location | Patents | Span |
|---|---|---|
| Burlingame, California, US | 1 | 1987 |