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Inventor

Katsuhiro Shimatake

Inventor
Toyama, JP

Overview

1→
Patents
2021
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Dprimary
G01DMeasuring not specially adapted for a specific variable50%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
PatentTitleYear
11,126,094Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to NIKON CORP (1)· patent assignee history
2021Based in Toyama, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NIKON CORP12021
Locations
LocationPatentsSpan
Toyama, JP12021