Inventor
Wen-Ben Chou
Inventor
Palo Alto, CA, US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
H01JElectric discharge tubes or discharge lamps29%
H10DInorganic electric semiconductor devices14%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1014%
PatentTitleYear
7,479,458'Methods and apparatus for the optimization of highly selective process gases'20096,977,184'Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring'20056,337,277'Clean chemistry low-k organic polymer etch'20025,904,571'Methods and apparatus for reducing charging during plasma processing'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2009Patents assigned to LAM RES CORP (4)· patent assignee history
1999–2005Based in Palo Alto, CA, US· patent location history
2009Based in Fremont, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 4 | 1999–2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Palo Alto, California, US | 3 | 1999–2005 |
| Fremont, California, US | 1 | 2009 |