Inventor
Satheesh Kuppurao
Inventor
San Jose, CA, US
Overview
Patents· 38 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
C23CCoating metallic material20%
H01LSemiconductor devices14%
C30BSingle-crystal growth11%
Y10TTechnical subjects covered by former us classification5%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light4%
H10DInorganic electric semiconductor devices4%
C01BNon-metallic elements3%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
H05BElectric heating3%
PatentTitleYear
10,458,040Upper dome with injection assembly201910,312,096Methods for titanium silicide formation using TiCl201910,306,708Absorbing reflector for semiconductor processing chamber201910,224,421Self-aligned process for sub-10nm fin formation201910,202,707Substrate processing system with lamphead having temperature management201910,119,192EPI base ring201810,077,508Multizone control of lamps in a conical lamphead using pyrometers20189,870,919'Process chamber having separate process gas and purge gas regions'20189,845,550Upper dome with injection assembly20179,842,753'Absorbing lamphead face'20179,832,816Absorbing reflector for semiconductor processing chamber20179,768,043'Quartz upper and lower domes'20179,580,835'Multizone control of lamps in a conical lamphead using pyrometers'20179,512,520'Semiconductor substrate processing system'20169,322,097'EPI base ring'20169,230,837'Multizone control of lamps in a conical lamphead using pyrometers'20169,058,988'Methods for depositing layers having reduced interfacial contamination'20158,991,332'Apparatus to control semiconductor film deposition characteristics'20158,813,538'Methods and apparatus for insitu analysis of gases in electronic device fabrication systems'20148,772,055'Multizone control of lamps in a conical lamphead using pyrometers'20148,728,944'Method of removing contaminants and native oxides from a substrate surface'20148,663,390'Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems'20148,313,804'Apparatus and methods for chemical vapor deposition'20128,020,427'Methods and apparatus for insitu analysis of gases in electronic device fabrication systems'20117,976,634'Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems'20117,967,911'Apparatus and methods for chemical vapor deposition'20117,955,646'Elimination of flow and pressure gradients in low utilization processes'20117,770,431'Methods and apparatus for insitu analysis of gases in electronic device fabrication systems'20107,718,225'Method to control semiconductor film deposition characteristics'20107,709,391'Methods for in-situ generation of reactive etch and growth specie in film formation processes'20107,560,352'Selective deposition'20097,494,545'Epitaxial deposition process and apparatus'20097,396,743'Low temperature epitaxial growth of silicon-containing films using UV radiation'20087,262,116'Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation'20076,410,456'Method and apparatus for insitu vapor generation'20026,280,790'Reducing the deposition rate of volatile contaminants onto an optical component of a substrate processing system'20016,159,866'Method for insitu vapor generation for forming an oxide on a substrate'20006,037,273'Method and apparatus for insitu vapor generation'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2019Patents assigned to APPLIED MATERIALS INC (36)· patent assignee history
2000–2002Based in Santa Clara, CA, US· patent location history
2007–2019Based in San Jose, CA, US· patent location history
2008–2018Patents assigned to KUPPURAO SATHEESH (10)· patent assignee history
2008–2015Patents assigned to HEMKAR MANISH (3)· patent assignee history
2012–2016Patents assigned to CARLSON DAVID K (4)· patent assignee history
2012–2015Patents assigned to SANCHEZ ERROL (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 36 | 2000–2019 |
| KUPPURAO SATHEESHself | 10 | 2008–2018 |
| CARLSON DAVID K | 4 | 2012–2016 |
| HEMKAR MANISH | 3 | 2008–2015 |
| SANCHEZ ERROL | 3 | 2012–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 34 | 2007–2019 |
| Santa Clara, California, US | 4 | 2000–2002 |