Inventor
Norihiko Tsuji
Inventor
Nirasaki, JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
B01DSeparation14%
C23CCoating metallic material14%
H01LSemiconductor devices14%
Y02CCapture, storage, sequestration or disposal of greenhouse gases [ghg]9%
Y02PClimate change mitigation technologies in the production or processing of goods9%
A61LMethods or apparatus for sterilising materials or objects in general5%
B65BMachines, apparatus or devices for, or methods of, packaging articles or materials5%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors5%
F16KValves5%
PatentTitleYear
10,867,820Substrate transfer device and substrate transfer method202010,811,289Substrate transfer apparatus and substrate processing system comprising plural connection units arranged side by side in a vertical and lateral directions along one side surface of a transfer chamber202010,134,619Connecting mechanism and connecting method of substrate container20189,732,881'Gate valve and substrate processing system'20178,835,873'Continuous sterilization system'20148,758,511'Film forming apparatus and vaporizer'20148,057,564'Exhaust trap device'20117,537,628'Exhaust trap device'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2020Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2009–2020Based in Nirasaki, JP· patent location history
2011–2014Patents assigned to TSUJI NORIHIKO (2)· patent assignee history
2014Patents assigned to AIREX CO LTD (1)· patent assignee history
2014Patents assigned to IIZUKA HACHISHIRO (1)· patent assignee history
2014Patents assigned to KIMURA KOICHIRO (1)· patent assignee history
2014Based in Nagoya, JP· patent location history
2017–2018Based in Yamanashi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2009–2020 |
| TSUJI NORIHIKOself | 2 | 2011–2014 |
| AIREX CO LTD | 1 | 2014 |
| IIZUKA HACHISHIRO | 1 | 2014 |
| KIMURA KOICHIRO | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 5 | 2009–2020 |
| Yamanashi, JP | 2 | 2017–2018 |
| Nagoya, JP | 1 | 2014 |