Inventor
ANAGNOSTIS TSIATMAS
Inventor
NL
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices24%
G06FElectric digital data processing15%
G01BMeasuring length, thickness or similar linear dimensions13%
G01NInvestigating or analysing materials by determining their chemical or physical properties13%
H01LSemiconductor devices13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
G06TImage data processing or generation, in general7%
G06KGraphical data reading2%
PatentTitleYear
12,468,235Method and apparatus to determine a patterning process parameter202512,322,660Method and apparatus to determine a patterning process parameter202512,142,535Method and apparatus to determine a patterning process parameter using a unit cell having geometric symmetry202412,124,174Metrology method and apparatus, computer program and lithographic system202411,947,269Method and apparatus to determine a patterning process parameter202411,784,098Method and apparatus to determine a patterning process parameter202311,728,224Method and apparatus to determine a patterning process parameter202311,710,668Method and apparatus to determine a patterning process parameter202311,604,419Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets202311,145,557Method and apparatus to determine a patterning process parameter202111,143,972Method and apparatus to determine a patterning process parameter2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to ASML NETHERLANDS BV (11)· patent assignee history
2021–2025Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 11 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 11 | 2021–2025 |