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Inventor

Nan Lu

Inventor
Santa Clara, CA, US

Overview

3→
Patents
2012–2017
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
B08BCleaning in general25%
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices13%
PatentTitleYear
9,552,968'Plasma cleaning apparatus and method'20178,721,796'Plasma cleaning apparatus and method'20148,252,696'Selective etching of silicon nitride'2012

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2012–2017Patents assigned to APPLIED MATERIALS INC (3)· patent assignee history
2012–2014Patents assigned to CHANG MEI (2)· patent assignee history
2012–2014Patents assigned to LU NAN (2)· patent assignee history
2012–2014Patents assigned to OR DAVID T (2)· patent assignee history
2012Based in San Jose, CA, US· patent location history
2014Patents assigned to DEEHAN MARTIN (1)· patent assignee history
2014–2017Based in Santa Clara, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
APPLIED MATERIALS INC32012–2017
CHANG MEI22012–2014
LU NANself22012–2014
OR DAVID T22012–2014
DEEHAN MARTIN12014
Locations
LocationPatentsSpan
Santa Clara, California, US22014–2017
San Jose, California, US12012