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Inventor

Irina I. Pozhinskaya

Inventor
Fairfield, CT, US

Overview

3→
Patents
2008–2012
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G02Bprimary
G02BOptical elements, systems or apparatus33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
G01NInvestigating or analysing materials by determining their chemical or physical properties22%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them11%
PatentTitleYear
8,107,173'Catadioptric optical system for scatterometry'20127,633,689'Catadioptric optical system for scatterometry'20097,405,802'Large field of view 2X magnification projection optical system for FPD manufacture'2008

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2008–2012Patents assigned to ASML HOLDING NV (3)· patent assignee history
2008Based in Stamford, CT, US· patent location history
2009–2012Based in Fairfield, CT, US· patent location history
2012Patents assigned to POZHINSKAYA IRINA I (1)· patent assignee history
2012Patents assigned to SHMAREV YEVGENIY KONSTANITINOVICH (1)· patent assignee history
2012Patents assigned to SMIRNOV STANISLAV Y (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML HOLDING NV32008–2012
POZHINSKAYA IRINA Iself12012
SHMAREV YEVGENIY KONSTANITINOVICH12012
SMIRNOV STANISLAV Y12012
Locations
LocationPatentsSpan
Fairfield, CT, US22009–2012
Stamford, CT, US12008