Inventor
Theodorus Marinus Modderman
Inventor
Nuenen, NL
Overview
Patents· 38 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices95%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them3%
PatentTitleYear
10,620,545Lithographic apparatus and device manufacturing method202010,324,384Lithographic apparatus and a method of manufacturing a lithographic apparatus201910,248,035Lithographic apparatus201910,222,706Lithographic apparatus and device manufacturing method201910,001,712Immersion lithographic apparatus and device manufacturing method20189,964,858Lithographic apparatus and device manufacturing method20189,835,960Lithographic apparatus20179,417,535'Lithographic apparatus'20169,329,494'Lithographic apparatus'20169,195,153'Lithographic apparatus and device manufacturing method'20159,116,443'Lithographic apparatus and device manufacturing method'20159,110,389'Lithographic apparatus and device manufacturing method'20159,091,940'Lithographic apparatus and method involving a fluid inlet and a fluid outlet'20158,797,503'Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure'20148,462,312'Lithographic apparatus and device manufacturing method'20138,363,208'Lithographic apparatus and device manufacturing method'20138,344,341'Lithographic apparatus and device manufacturing method'20138,233,137'Lithographic apparatus and device manufacturing method'20128,208,120'Lithographic apparatus and device manufacturing method'20127,982,850'Immersion lithographic apparatus and device manufacturing method with gas supply'20117,835,017'Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby'20107,795,603'Lithographic apparatus and device manufacturing method'20107,684,008'Lithographic apparatus and device manufacturing method'20107,528,931'Lithographic apparatus and device manufacturing method'20097,482,611'Lithographic apparatus and device manufacturing method'20097,388,648'Lithographic projection apparatus'20087,372,541'Lithographic apparatus and device manufacturing method'20087,317,504'Lithographic apparatus and device manufacturing method'20087,206,058'Off-axis levelling in lithographic projection apparatus'20077,202,938'Off-axis levelling in lithographic projection apparatus'20077,193,232'Lithographic apparatus and device manufacturing method with substrate measurement not through liquid'20077,081,943'Lithographic apparatus and device manufacturing method'20067,078,715'Lithographic apparatus and apparatus adjustment method'20067,019,815'Off-axis leveling in lithographic projection apparatus'20066,952,253'Lithographic apparatus and device manufacturing method'20056,882,405'Off-axis levelling in lithographic projection apparatus'20056,674,510'Off-axis levelling in lithographic projection apparatus'20045,303,590'Method of and an apparatus for frequency selective ultrasonic inspection of multi-layered structures'1994Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1994Based in Heemstede, NL· patent location history
2004–2020Patents assigned to ASML NETHERLANDS BV (37)· patent assignee history
2004–2020Based in Nuenen, NL· patent location history
2012–2015Patents assigned to MODDERMAN THEODORUS MARINUS (9)· patent assignee history
2012–2015Patents assigned to DE SMIT JOANNES THEODOOR (6)· patent assignee history
2012–2015Patents assigned to LOF JOERI (4)· patent assignee history
2012–2015Patents assigned to LOOPSTRA ERIK ROELOF (4)· patent assignee history
2012Based in Neunen, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 37 | 2004–2020 |
| MODDERMAN THEODORUS MARINUSself | 9 | 2012–2015 |
| DE SMIT JOANNES THEODOOR | 6 | 2012–2015 |
| LOF JOERI | 4 | 2012–2015 |
| LOOPSTRA ERIK ROELOF | 4 | 2012–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nuenen, NL | 36 | 2004–2020 |
| Neunen, NL | 1 | 2012 |
| Heemstede, NL | 1 | 1994 |