LexDanaLexDanabeta
Inventor

Kul Inn

Inventor
Seongnam-si, KR

Overview

3→
Patents
2019–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H04NPictorial communication, e.g. television18%
G01BMeasuring length, thickness or similar linear dimensions9%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light9%
H01LSemiconductor devices9%
PatentTitleYear
10,971,343Apparatus for monitoring process chamber202110,481,005Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same201910,229,818Apparatus for monitoring process chamber2019

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2019–2021Patents assigned to SAMSUNG ELECTRONICS CO LTD (3)· patent assignee history
2019–2021Based in Seongnam-si, KR· patent location history
2019Based in Seoul, KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SAMSUNG ELECTRONICS CO LTD32019–2021
Locations
LocationPatentsSpan
Seongnam-si, KR22019–2021
Seoul, KR12019