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Inventor

Yoshio Seqi

Inventor
Shizuoka, JP

Overview

1→
Patents
2002
Patent span
Chemistry
Primary field (CPC C)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material50%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests50%
PatentTitleYear
6,453,913'Method of cleaning a film deposition apparatus, method of dry etching a film deposition apparatus, and an article production method including a process based on the cleaning or dry etching method'2002

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2002Patents assigned to CANON KK (1)· patent assignee history
2002Based in Shizuoka, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
CANON KK12002
Locations
LocationPatentsSpan
Shizuoka, JP12002