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Inventor

CHANGHYEONG YOON

Inventor
KR

Overview

2→
Patents
2023–2024
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices17%
G06NComputing arrangements based on specific computational models17%
H01LSemiconductor devices17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
PatentTitleYear
12,002,698Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method202411,624,699Measurement system capable of adjusting AOI, AOI spread and azimuth of incident light2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023–2024Patents assigned to SAMSUNG ELECTRONICS CO LTD (2)· patent assignee history
2023–2024Based in KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SAMSUNG ELECTRONICS CO LTD22023–2024
Locations
LocationPatentsSpan
KR22023–2024