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Inventor

Hajime Ugajin

Inventor
Nirasaki, JP

Overview

5→
Patents
2007–2015
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
H01LSemiconductor devices15%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1015%
B08BCleaning in general8%
H10BElectronic memory devices8%
H10DInorganic electric semiconductor devices8%
Y10TTechnical subjects covered by former us classification8%
PatentTitleYear
8,968,475'Substrate processing apparatus'20158,956,546'Substrate processing method and substrate processing apparatus'20158,440,568'Substrate etching method and system'20137,979,942'Substrate treatment apparatus and substrate treatment method'20117,252,778'Etching method and etching device'2007

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2007–2011Patents assigned to SONY CORP (2)· patent assignee history
2007–2011Based in Kanagawa, JP· patent location history
2011Patents assigned to DAINIPPON SCREEN MFG (1)· patent assignee history
2013–2015Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2013–2015Patents assigned to UGAJIN HAJIME (3)· patent assignee history
2013–2015Based in Nirasaki, JP· patent location history
2015Patents assigned to TOZAWA SHIGEKI (2)· patent assignee history
2015Based in Yamanashi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32013–2015
UGAJIN HAJIMEself32013–2015
SONY CORP22007–2011
TOZAWA SHIGEKI22015
DAINIPPON SCREEN MFG12011
Locations
LocationPatentsSpan
Nirasaki, JP22013–2015
Kanagawa, JP22007–2011
Yamanashi, JP12015