Inventor
Michelle T. Schulberg
Inventor
Palo Alto, CA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
C23CCoating metallic material14%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1014%
C08GMacromolecular compounds obtained otherwise than by reactions only involving unsaturated carbon-to-carbon bonds7%
C25DProcesses for the electrolytic or electrophoretic production of coatings7%
Y02PClimate change mitigation technologies in the production or processing of goods7%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
Y10TTechnical subjects covered by former us classification7%
PatentTitleYear
7,589,028'Hydroxyl bond removal and film densification method for oxide films using microwave post treatment'20097,208,389'Method of porogen removal from porous low-k films using UV radiation'20077,176,144'Plasma detemplating and silanol capping of porous dielectric films'20076,951,765'Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor'20056,576,345'Dielectric films with low dielectric constants'20036,340,628'Method to deposit SiOCH films with dielectric constant below 3.0'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2009Patents assigned to NOVELLUS SYSTEMS INC (6)· patent assignee history
2002–2007Based in Palo Alto, CA, US· patent location history
2009Based in Newton, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NOVELLUS SYSTEMS INC | 6 | 2002–2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Palo Alto, California, US | 5 | 2002–2007 |
| Newton, Massachusetts, US | 1 | 2009 |