Inventor
Tatuharu Yamamoto
Inventor
Higashimurayama, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1067%
C23CCoating metallic material17%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests17%
PatentTitleYear
6,518,548'Substrate temperature control system and method for controlling temperature of substrate'20036,394,797'Substrate temperature control system and method for controlling temperature of substrate'20025,981,399'Method and apparatus for fabricating semiconductor devices'19995,628,828'Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2003Patents assigned to HITACHI LTD (4)· patent assignee history
1997–2003Based in Higashimurayama, JP· patent location history
1999Based in Higashi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 4 | 1997–2003 |
Locations
| Location | Patents | Span |
|---|---|---|
| Higashimurayama, JP | 3 | 1997–2003 |
| Higashi, JP | 1 | 1999 |