LexDanaLexDanabeta
Inventor

Yoshifumi Sakuma

Inventor
Tsukuba, JP

Overview

1→
Patents
2002
Patent span
Performing operations
Primary field (CPC B)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
6,340,434'Method and apparatus for chemical-mechanical polishing'2002

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2002Patents assigned to LSI LOGIC CORP (1)· patent assignee history
2002Based in Tsukuba, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LSI LOGIC CORP12002
Locations
LocationPatentsSpan
Tsukuba, JP12002