Inventor
Ron Van De Laak
Inventor
Eindhoven, NL
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Jprimary
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light25%
G01SRadio direction-finding25%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
7,773,235'Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus'20107,409,302'Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus'20087,308,368'Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2010Patents assigned to ASML NETHERLANDS BV (3)· patent assignee history
2007–2010Based in Eindhoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 3 | 2007–2010 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 3 | 2007–2010 |