Inventor
Gota Niimi
Inventor
Shizuoka, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H05Gprimary
H05GX-ray technique32%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices14%
H01JElectric discharge tubes or discharge lamps9%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light9%
F21VFunctional features or details of lighting devices or systems thereof5%
F28DHeat-exchange apparatus, not provided for in another subclass, in which the heat-exchange media do not come into direct contact5%
F28FDetails of heat-exchange and heat-transfer apparatus, of general application5%
G01FMeasuring volume, volume flow, mass flow or liquid level5%
G05DSystems for controlling or regulating non-electric variables5%
G21KHandling of particles or ionising radiation not otherwise provided for5%
PatentTitleYear
10,591,342Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device20209,686,846'Extreme UV radiation light source device'20179,581,392'Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type'20179,572,240'Light source apparatus'20179,480,136'Extreme UV radiation light source device'20169,202,659'Arrangement and method for cooling a plasma-based radiation source'20157,482,740'Electrode unit of extreme ultraviolet generator'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2020Patents assigned to USHIO ELECTRIC INC (7)· patent assignee history
2009Based in Shimizu, JP· patent location history
2015–2017Based in Shizuoka, JP· patent location history
2017–2020Based in Tokyo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| USHIO ELECTRIC INC | 7 | 2009–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Shizuoka, JP | 4 | 2015–2017 |
| Tokyo, JP | 2 | 2017–2020 |
| Shimizu, JP | 1 | 2009 |