Inventor
Hui Chen
Inventor
Burlingame, CA, US
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1034%
B08BCleaning in general13%
H01LSemiconductor devices13%
B24BMachines, devices, or processes for grinding or polishing9%
A46BBrushes6%
A61CDentistry3%
B23PMetal-working not otherwise provided for3%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding3%
G01VGeophysics3%
H01JElectric discharge tubes or discharge lamps3%
PatentTitleYear
10,256,120Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning201910,229,842Double sided buff module for post CMP cleaning20199,873,179Carrier for small pad for chemical mechanical polishing20189,119,461'High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods'20158,968,055'Methods and apparatus for pre-chemical mechanical planarization buffing module'20158,844,546'Apparatus and method for cleaning semiconductor substrate using pressurized fluid'20148,181,302'Brush alignment control mechanism'20128,101,934'Methods and apparatus for detecting a substrate notch or flat'20127,962,990'Brush box cleaner module with force control'20117,774,887'Scrubber box and methods for using the same'20107,636,996'Seal installation tool'20097,377,002'Scrubber box'20086,905,968'Process for selectively etching dielectric layers'20056,569,775'Method for enhancing plasma processing performance'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2019Patents assigned to APPLIED MATERIALS INC (14)· patent assignee history
2003Based in Santa Clara, CA, US· patent location history
2005–2018Based in San Jose, CA, US· patent location history
2008–2019Based in Burlingame, CA, US· patent location history
2012–2015Patents assigned to CHEN HUI (4)· patent assignee history
2014–2015Patents assigned to D AMBRA ALLEN L (2)· patent assignee history
2015Patents assigned to ATKINSON JIM (2)· patent assignee history
2015Patents assigned to CHEN HUNG (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 14 | 2003–2019 |
| CHEN HUIself | 4 | 2012–2015 |
| ATKINSON JIM | 2 | 2015 |
| CHEN HUNG | 2 | 2015 |
| D AMBRA ALLEN L | 2 | 2014–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Burlingame, California, US | 11 | 2008–2019 |
| San Jose, California, US | 2 | 2005–2018 |
| Santa Clara, California, US | 1 | 2003 |