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Inventor

Shigeki Amemiya

Inventor
Miyagi, JP

Overview

2→
Patents
2016–2018
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices40%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
B08BCleaning in general20%
PatentTitleYear
10,010,913Purging apparatus and purging method for substrate storage container20189,305,817'Method for purging a substrate container'2016

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2016–2018Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2016–2018Based in Miyagi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22016–2018
Locations
LocationPatentsSpan
Miyagi, JP22016–2018