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Inventor

Weidung Yang

Inventor
Milpitas, CA, US

Overview

2→
Patents
2009–2010
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
G05BControl or regulating systems in general29%
G01BMeasuring length, thickness or similar linear dimensions14%
G01NInvestigating or analysing materials by determining their chemical or physical properties14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
PatentTitleYear
7,729,873'Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology'20107,627,392'Automated process control using parameters determined with approximation and fine diffraction models'2009

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2009–2010Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2009–2010Based in Milpitas, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22009–2010
Locations
LocationPatentsSpan
Milpitas, California, US22009–2010