Inventor
CHE-HAO TU
Inventor
TW
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H10DInorganic electric semiconductor devices18%
B24BMachines, devices, or processes for grinding or polishing12%
B08BCleaning in general6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
PatentTitleYear
12,593,665Hard mask removal method202612,568,786Processing tool and method202612,128,455Electrical cleaning tool for wafer polishing tool system202412,068,196Forming gate line-end of semiconductor structures with improved metal gate height202411,951,587Zone-based CMP target control202411,854,821Hard mask removal method2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2026Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (6)· patent assignee history
2023–2026Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 6 | 2023–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 6 | 2023–2026 |