Inventor
THOMAS POIESZ
Inventor
NL
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01LSemiconductor devices23%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling7%
H02NElectric machines not otherwise provided for7%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding3%
C23CCoating metallic material3%
PatentTitleYear
12,560,872Vacuum sheet bond fixturing and flexible burl applications for substrate tables202612,374,577Substrate restraining system202512,321,104Substrate holder for use in a lithographic apparatus202512,158,704Method of clamping a substrate to a clamping system, a substrate holder and a substrate support202411,953,837Method, substrate and system for estimating stress in a substrate202411,664,264Lithographic apparatus, method for unloading a substrate and method for loading a substrate202311,448,976Substrate holder for use in a lithographic apparatus202211,269,259Lithographic apparatus and a device manufacturing method202211,187,998Substrate holder, substrate support and method of clamping a substrate to a clamping system2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to ASML NETHERLANDS BV (9)· patent assignee history
2021–2026Based in NL· patent location history
2022–2026Patents assigned to ASML HOLDING NV (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 9 | 2021–2026 |
| ASML HOLDING NV | 3 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 9 | 2021–2026 |