Inventor

Shawming Ma

Inventor

Sunnyvale, CA, US

Overview

1999–2021

Patent span

Electricity

Primary field (CPC H)

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary

H01JElectric discharge tubes or discharge lamps22%

B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems11%

E03DWater-closets or urinals with flushing devices11%

G01NInvestigating or analysing materials by determining their chemical or physical properties11%

H01LSemiconductor devices11%

H05HPlasma technique11%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%

Y02ATechnologies for adaptation to climate change11%

PatentTitleYear

Assembled from patent assignee/location history and declaration credentials.

1999Based in Jhubei City, TW· patent location history

2021Patents assigned to BEIJING E TOWN SEMICONDUCTOR TECH CO LTD (2)· patent assignee history

2021Patents assigned to MATTSON TECH INC (2)· patent assignee history

2021Based in Sunnyvale, CA, US· patent location history

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD	2	2021
MATTSON TECH INC	2	2021

Locations

Location	Patents	Span
Sunnyvale, California, US	2	2021
Jhubei City, TW	1	1999