Inventor
Shinzo Morita
Inventor
Nagoya, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices44%
C08FMacromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds33%
G02BOptical elements, systems or apparatus22%
PatentTitleYear
6,687,449'Optical waveguide element, a three-dimensional optical waveguide circuit and optical system'20046,577,791'Optical waveguide element, a three-dimensional optical waveguide circuit and optical system'20034,421,843'Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film'19834,421,842'Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film'19834,382,985'Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film'19834,283,482'Dry Lithographic Process'1981Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1981Patents assigned to ULVAC CORP (1)· patent assignee history
1981–2004Based in Nagoya, JP· patent location history
1983Patents assigned to DAIKIN IND LTD (3)· patent assignee history
2003–2004Patents assigned to UNIV NAGOYA (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| DAIKIN IND LTD | 3 | 1983 |
| UNIV NAGOYA | 2 | 2003–2004 |
| ULVAC CORP | 1 | 1981 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nagoya, JP | 6 | 1981–2004 |