Inventor
Toshifumi Honda
Inventor
Yokohama, JP
Overview
Patents· 94 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties35%
G06TImage data processing or generation, in general15%
H01JElectric discharge tubes or discharge lamps11%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h108%
H01LSemiconductor devices4%
G01BMeasuring length, thickness or similar linear dimensions3%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light3%
G02BOptical elements, systems or apparatus3%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
G06FElectric digital data processing3%
PatentTitleYear
10,861,145Defect inspection device and defect inspection method202010,830,706Defect inspection apparatus and defect inspection method202010,816,484Flaw inspection device and flaw inspection method202010,642,164Defect detection device and defect observation device202010,466,181Flaw inspection device and flaw inspection method201910,401,300Defect observation method and device and defect detection device201910,261,026Defect inspection method, low light detecting method, and low light detector201910,228,332Defect inspection device and defect inspection method20199,976,966Defect inspection method and its device20189,865,046'Defect inspection method and defect inspection device'20189,778,206'Defect inspection device and defect inspection method'20179,773,641'Method and apparatus for observing defects'20179,733,194'Method for reviewing a defect and apparatus'20179,683,946'Method and device for detecting defects and method and device for observing defects'20179,678,021'Method and apparatus for inspecting defects'20179,645,094'Defect inspection device and defect inspection method'20179,606,071'Defect inspection method and device using same'20179,588,055'Defect inspection apparatus and defect inspection method'20179,588,054'Defect inspection method, low light detecting method and low light detector'20179,568,439'Defect inspection device and defect inspection method'20179,523,648'Defect inspection device and defect inspection method'20169,513,228'Defect inspection method and its device'20169,506,876'X-ray inspection device, inspection method, and X-ray detector'20169,488,596'Defect inspection method and device for same'20169,470,640'Defect inspection method and defect inspection device'20169,436,990'Defect observation method and device therefor'20169,390,490'Method and device for testing defect using SEM'20169,360,434'Optical inspection apparatus and method thereof'20169,329,136'Defect inspection device and defect inspection method'20169,329,137'Defect inspection method and device using same'20169,310,318'Defect inspection method and defect inspection device'20169,291,574'Defect inspection method and defect inspection device'20169,267,898'Optical inspection method and optical inspection apparatus'20169,255,888'Defect inspection method and device for same'20169,255,793'Defect inspection method and device thereof'20169,239,283'Defect inspection method and device therefor'20169,109,194'Device for harvesting bacterial colony and method therefor'20159,075,026'Defect inspection device and defect inspection method'20159,041,921'Defect inspection device and defect inspection method'20159,019,492'Defect inspection device and defect inspection method'20158,975,582'Method and apparatus for reviewing defects'20158,970,836'Defect inspecting apparatus and defect inspecting method'20158,958,062'Defect inspection method and device using same'20158,922,764'Defect inspection method and defect inspection apparatus'20148,908,172'Defect inspection device and method of inspecting defect'20148,853,628'Defect inspection method, and device thereof'20148,804,112'Method of defect inspection and device of defect inspection'20148,804,110'Fault inspection device and fault inspection method'20148,711,347'Defect inspection method and device therefor'20148,670,116'Method and device for inspecting for defects'20148,599,369'Defect inspection device and inspection method'20138,581,976'Method and apparatus for reviewing defects of semiconductor device'20138,547,429'Apparatus and method for monitoring semiconductor device manufacturing process'20138,514,388'Flaw inspecting method and device therefor'20138,509,516'Circuit pattern examining apparatus and circuit pattern examining method'20138,461,527'Scanning electron microscope and method for processing an image obtained by the scanning electron microscope'20138,452,076'Defect classifier using classification recipe based on connection between rule-based and example-based classifiers'20138,405,025'Scanning electron microscope and method for detecting an image using the same'20138,150,141'Defect classifier using classification recipe based on connection between rule-based and example-based classifiers'20128,121,395'Inspection apparatus and an inspection method for inspecting a circuit pattern'20128,106,357'Scanning electron microscope and method for processing an image obtained by the scanning electron microscope'20128,093,557'Method and apparatus for reviewing defects'20128,090,190'Method and apparatus for reviewing defects'20127,991,217'Defect classifier using classification recipe based on connection between rule-based and example-based classifiers'20117,903,867'Method and apparatus for displaying detected defects'20117,873,205'Apparatus and method for classifying defects using multiple classification modules'20117,873,202'Method and apparatus for reviewing defects of semiconductor device'20117,834,317'Scanning electron microscope and system for inspecting semiconductor device'20107,764,826'Method and apparatus of reviewing defects on a semiconductor device'20107,756,320'Defect classification using a logical equation for high stage classification'20107,734,082'Defect inspection method'20107,656,171'Method and apparatus for reviewing defects by detecting images having voltage contrast'20107,657,078'Method and apparatus for reviewing defects'20107,626,163'Defect review method and device for semiconductor device'20097,601,954'Method and apparatus for reviewing defects'20097,602,962'Method of classifying defects using multiple inspection machines'20097,598,491'Observing method and its apparatus using electron microscope'20097,598,490'SEM-type reviewing apparatus and a method for reviewing defects using the same'20097,583,832'Method and its apparatus for classifying defects'20097,449,898'Method and apparatus for reviewing defects by detecting images having voltage contrast'20087,432,503'Scanning electron microscope and method for detecting an image using the same'20087,424,146'Defect inspection method'20087,361,896'Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope'20087,205,555'Defect inspection apparatus and defect inspection method'20077,181,060'Defect inspection method'20077,170,593'Method of reviewing detected defects'20077,105,815'Method and apparatus for collecting defect images'20067,075,077'Method of observing a specimen using a scanning electron microscope'20066,965,429'Method of reviewing detected defects'20056,855,930'Defect inspection apparatus and defect inspection method'20056,622,054'Method monitoring a quality of electronic circuits and its manufacturing condition and system for it'20036,553,323'Method and its apparatus for inspecting a specimen'20036,333,992'Defect judgement processing method and apparatus'20016,249,598'Solder testing apparatus'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2016Patents assigned to HITACHI LTD (12)· patent assignee history
2001Based in Funabashi, JP· patent location history
2003–2019Based in Yokohama, JP· patent location history
2006–2020Patents assigned to HITACHI HIGH TECH CORP (82)· patent assignee history
2007–2020Based in Tokyo, JP· patent location history
2007Based in Ebina, JP· patent location history
2012–2017Patents assigned to HONDA TOSHIFUMI (34)· patent assignee history
2013–2017Patents assigned to URANO YUTA (12)· patent assignee history
2014–2016Patents assigned to SHIBATA YUKIHIRO (10)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI HIGH TECH CORP | 82 | 2006–2020 |
| HONDA TOSHIFUMIself | 34 | 2012–2017 |
| HITACHI LTD | 12 | 2001–2016 |
| URANO YUTA | 12 | 2013–2017 |
| SHIBATA YUKIHIRO | 10 | 2014–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yokohama, JP | 59 | 2003–2019 |
| Tokyo, JP | 32 | 2007–2020 |
| Funabashi, JP | 2 | 2001 |
| Ebina, JP | 1 | 2007 |