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Inventor

Layton Hale

Inventor
Castro Valley, CA, US

Overview

13→
Patents
1997–2020
Patent span
Physics
Primary field (CPC G)

Patents· 13 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
G02BOptical elements, systems or apparatus9%
H05GX-ray technique7%
B82YSpecific uses or applications of nanostructures5%
F16FSprings5%
F16MFrames, casings or beds of engines, machines or apparatus, not specific to engines, machines or apparatus provided for elsewhere5%
G01NInvestigating or analysing materials by determining their chemical or physical properties5%
H01JElectric discharge tubes or discharge lamps5%
H05HPlasma technique5%
Y10TTechnical subjects covered by former us classification5%
PatentTitleYear
10,880,979Droplet generation for a laser produced plasma light source202010,500,416High bandwidth binary multi-leaf collimator design20199,690,213'Linear Stage for reflective electron beam lithography'20179,544,984'System and method for generation of extreme ultraviolet light'20179,298,106'Wafer stage with reciprocating wafer stage actuation control'20168,963,110'Continuous generation of extreme ultraviolet light'20158,724,115'Linear stage and metrology architecture for reflective electron beam lithography'20146,325,351'Highly damped kinematic coupling for precision instruments'20016,206,966'Pedestal substrate for coated optics'20016,147,818'Projection optics box'20006,065,898'Three tooth kinematic coupling'20005,986,827'Precision tip-tilt-piston actuator that provides exact constraint'19995,642,956'Adjustable link for kinematic mounting systems'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997–2001Patents assigned to UNIV CALIFORNIA (6)· patent assignee history
1997–2001Based in Livermore, CA, US· patent location history
2014–2020Patents assigned to KLA TENCOR CORP (6)· patent assignee history
2014–2020Based in Castro Valley, CA, US· patent location history
2016–2017Patents assigned to HALE LAYTON (2)· patent assignee history
2016–2017Patents assigned to UMMETHALA UPENDRA (2)· patent assignee history
2017Patents assigned to CLYNE JOSHUA (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KLA TENCOR CORP62014–2020
UNIV CALIFORNIA61997–2001
HALE LAYTONself22016–2017
UMMETHALA UPENDRA22016–2017
CLYNE JOSHUA12017
Locations
LocationPatentsSpan
Castro Valley, California, US72014–2020
Livermore, California, US61997–2001