LexDanaLexDanabeta
Inventor

Ryosuke ARAI

Inventor
JP

Overview

1→
Patents
2021
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
11,198,935Heating part, substrate processing apparatus, and method of manufacturing semiconductor device2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to HITACHI INT ELECTRIC INC (1)· patent assignee history
2021Patents assigned to KOKUSAI ELECTRIC CORP (1)· patent assignee history
2021Patents assigned to TOKYO TECH LABO CO LTD (1)· patent assignee history
2021Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI INT ELECTRIC INC12021
KOKUSAI ELECTRIC CORP12021
TOKYO TECH LABO CO LTD12021
Locations
LocationPatentsSpan
JP12021