Inventor
VINCENT E. BURKHART
Inventor
US
Overview
Patents· 2 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material15%
H01JElectric discharge tubes or discharge lamps15%
H01LSemiconductor devices15%
H03HImpedance networks, e.g. resonant circuits15%
H05BElectric heating15%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
H05HPlasma technique8%
PatentTitleYear
12,217,939RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks202511,183,368RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to LAM RES CORP (2)· patent assignee history
2021–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 2 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 2 | 2021–2025 |