Inventor
Noriyuki Mitome
Inventor
Shimotsuke, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices60%
G01NInvestigating or analysing materials by determining their chemical or physical properties20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
PatentTitleYear
7,986,403'Foreign substance inspection apparatus'20117,733,471'Foreign substance inspection apparatus'20105,790,258'Position detecting device'19985,695,897'Alignment method and semiconductor exposure method'19975,172,189'Exposure apparatus'19924,901,109'Alignment and exposure apparatus'1990Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1990–2011Patents assigned to CANON KK (6)· patent assignee history
1990Based in Yokohama, JP· patent location history
1992Based in Kawasaki, JP· patent location history
1997Based in Tochigi, JP· patent location history
1998Based in Utsunomiya, JP· patent location history
2010–2011Based in Shimotsuke, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 6 | 1990–2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Shimotsuke, JP | 2 | 2010–2011 |
| Utsunomiya, JP | 1 | 1998 |
| Tochigi, JP | 1 | 1997 |
| Kawasaki, JP | 1 | 1992 |
| Yokohama, JP | 1 | 1990 |