Inventor
Diego Feijoo
Inventor
Burghausen, DE
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1048%
B08BCleaning in general14%
C30BSingle-crystal growth10%
B24BMachines, devices, or processes for grinding or polishing5%
C11DDetergent compositions5%
C23FNon-mechanical removal of metallic material from surface5%
G01BMeasuring length, thickness or similar linear dimensions5%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%
H01LSemiconductor devices5%
PatentTitleYear
9,230,794'Process for cleaning, drying and hydrophilizing a semiconductor wafer'20168,685,270'Method for producing a semiconductor wafer'20148,580,046'Method for the treatment of a semiconductor wafer'20138,372,213'Method for the treatment of a semiconductor wafer'20138,070,882'Method for the wet-chemical treatment of a semiconductor wafer'20117,988,876'Method for reducing and homogenizing the thickness of a semiconductor layer which lies on the surface of an electrically insulating material'20117,938,911'Process for cleaning a semiconductor wafer using a cleaning solution'20117,829,467'Method for producing a polished semiconductor'20107,799,692'Method and apparatus for the treatment of a semiconductor wafer'20107,538,008'Method for producing a layer structure'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2016Patents assigned to SILTRONIC AG (10)· patent assignee history
2009–2016Based in Burghausen, DE· patent location history
2011–2016Patents assigned to BUSCHHARDT THOMAS (4)· patent assignee history
2011–2016Patents assigned to FEIJOO DIEGO (4)· patent assignee history
2011–2016Patents assigned to SCHWAB GUENTER (4)· patent assignee history
2011–2016Patents assigned to ZAPILKO CLEMENS (2)· patent assignee history
2014Based in Bughausen, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SILTRONIC AG | 10 | 2009–2016 |
| BUSCHHARDT THOMAS | 4 | 2011–2016 |
| FEIJOO DIEGOself | 4 | 2011–2016 |
| SCHWAB GUENTER | 4 | 2011–2016 |
| ZAPILKO CLEMENS | 2 | 2011–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Burghausen, DE | 9 | 2009–2016 |
| Bughausen, DE | 1 | 2014 |