Inventor
Chad Rue
Inventor
Portland, OR, US
Overview
Patents· 24 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
H01LSemiconductor devices14%
G01NInvestigating or analysing materials by determining their chemical or physical properties13%
C23CCoating metallic material6%
C23FNon-mechanical removal of metallic material from surface5%
G06TImage data processing or generation, in general5%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices4%
G01QScanning-probe techniques or apparatus3%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
PatentTitleYear
11,069,523Method of material deposition202111,062,879Face-on, gas-assisted etching for plan-view lamellae preparation202110,930,514Method and apparatus for the planarization of surfaces202110,546,719Face-on, gas-assisted etching for plan-view lamellae preparation202010,347,463Enhanced charged particle beam processes for carbon removal201910,325,754Ion implantation to alter etch rate201910,190,953Tomography sample preparation systems and methods with improved speed, automation, and reliability20199,983,152Material characterization using ion channeling imaging20189,978,586Method of material deposition20189,761,467'Gas injection system with precursor for planar deprocessing of semiconductor devices using a focused ion beam'20179,443,697'Low energy ion beam etch'20169,087,366'High accuracy beam placement for local area navigation'20159,064,811'Precursor for planar deprocessing of semiconductor devices using a focused ion beam'20158,781,219'High accuracy beam placement for local area navigation'20148,610,092'Charged particle beam processing system with visual and infrared imaging'20138,455,822'Navigation and sample processing using an ion source containing both low-mass and high-mass species'20138,358,832'High accuracy beam placement for local area navigation'20138,059,918'High accuracy beam placement for local area navigation'20117,781,733'In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques'20107,351,966'High-resolution optical channel for non-destructive navigation and processing of integrated circuits'20087,119,333'Ion detector for ion beam applications'20066,946,064'Sample mount for performing sputter-deposition in a focused ion beam (FIB) tool'20056,900,137'Dry etch process to edit copper lines'20056,843,893'Metal dry etch using electronic field'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2010Patents assigned to IBM (6)· patent assignee history
2005–2008Based in Poughkeepsie, NY, US· patent location history
2010–2021Based in Portland, OR, US· patent location history
2011–2021Patents assigned to FEI CO (18)· patent assignee history
2011–2014Patents assigned to RUE CHAD (5)· patent assignee history
2011–2014Patents assigned to CARLESON PETER D (3)· patent assignee history
2011–2014Patents assigned to YOUNG RICHARD J (3)· patent assignee history
2019Based in Hillsboro, OR, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| FEI CO | 18 | 2011–2021 |
| IBM | 6 | 2005–2010 |
| RUE CHADself | 5 | 2011–2014 |
| CARLESON PETER D | 3 | 2011–2014 |
| YOUNG RICHARD J | 3 | 2011–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Portland, OR, US | 18 | 2010–2021 |
| Poughkeepsie, New York, US | 5 | 2005–2008 |
| Hillsboro, OR, US | 1 | 2019 |