Inventor
Qunying Lin
Inventor
Singapore, SG
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices76%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them6%
H10DInorganic electric semiconductor devices6%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h106%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
PatentTitleYear
8,450,046'Methods for enhancing photolithography patterning'20138,048,588'Method and apparatus for removing radiation side lobes'20118,034,543'Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask'20118,003,311'Integrated circuit system employing multiple exposure dummy patterning technology'20117,926,000'Integrated circuit system employing dipole multiple exposure'20117,836,420'Integrated circuit system with assist feature'20107,674,562'Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask'20107,649,612'Phase shifting photolithography system'20107,560,199'Polarizing photolithography system'20097,556,891'Method and apparatus for contact hole unit cell formation'20097,445,874'Method to resolve line end distortion for alternating phase shift mask'20087,421,676'System and method for phase shift assignment'20087,384,714'Anti-reflective sidewall coated alternating phase shift mask and fabrication method'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2011Patents assigned to CHARTERED SEMICONDUCTOR MFG (9)· patent assignee history
2008–2013Based in Singapore, SG· patent location history
2011–2013Patents assigned to GLOBALFOUNDRIES SG PTE LTD (3)· patent assignee history
2011Patents assigned to GLOBAL FOUNDRIES SINGAPORE PTE LTD (1)· patent assignee history
2013Patents assigned to CHUA GEK SOON (1)· patent assignee history
2013Patents assigned to LIN QUNYING (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CHARTERED SEMICONDUCTOR MFG | 9 | 2008–2011 |
| GLOBALFOUNDRIES SG PTE LTD | 3 | 2011–2013 |
| CHUA GEK SOON | 1 | 2013 |
| GLOBAL FOUNDRIES SINGAPORE PTE LTD | 1 | 2011 |
| LIN QUNYINGself | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Singapore, SG | 13 | 2008–2013 |