Inventor
Kazunori Kazama
Inventor
Nirasaki, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
C23CCoating metallic material17%
H01LSemiconductor devices17%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests17%
G05DSystems for controlling or regulating non-electric variables8%
H01JElectric discharge tubes or discharge lamps8%
PatentTitleYear
10,460,949Substrate processing apparatus, substrate processing method and storage medium201910,254,774Temperature control method, control apparatus, and plasma processing apparatus20198,172,949'Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program'20127,756,599'Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2019Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2010–2019Based in Nirasaki, JP· patent location history
2012Patents assigned to KAZAMA KAZUNORI (1)· patent assignee history
2012Patents assigned to KUDO TOMOYUKI (1)· patent assignee history
2012Patents assigned to MORIYA TSUYOSHI (1)· patent assignee history
2012Patents assigned to NAGAIKE HIROSHI (1)· patent assignee history
2019Based in Miyagi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 2010–2019 |
| KAZAMA KAZUNORIself | 1 | 2012 |
| KUDO TOMOYUKI | 1 | 2012 |
| MORIYA TSUYOSHI | 1 | 2012 |
| NAGAIKE HIROSHI | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 3 | 2010–2019 |
| Miyagi, JP | 1 | 2019 |