Inventor
III, Ivan L. Berry
Inventor
US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H01LSemiconductor devices13%
H10BElectronic memory devices13%
H10NElectric solid-state devices not otherwise provided for13%
G11CStatic stores9%
H01JElectric discharge tubes or discharge lamps9%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
G06FElectric digital data processing4%
G06NComputing arrangements based on specific computational models4%
PatentTitleYear
12,302,760Ion beam etching with sidewall cleaning202512,029,133Ion beam etching with sidewall cleaning202411,637,022Electron excitation atomic layer etch202311,520,953Predicting etch characteristics in thermal etching and atomic layer etching202211,289,306Ion beam etching utilizing cryogenic wafer temperatures202211,195,730Method and apparatus for processing wafer-shaped articles2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021Patents assigned to LAM RES AG (1)· patent assignee history
2021–2025Based in US· patent location history
2022–2025Patents assigned to LAM RES CORP (5)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 5 | 2022–2025 |
| LAM RES AG | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 6 | 2021–2025 |