Inventor
Peter Kuschnerus
Inventor
Jena, DE
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
8,268,516'Method for repairing phase shift masks'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012Patents assigned to KIENZLE OLIVER (1)· patent assignee history
2012Patents assigned to KUSCHNERUS PETER (1)· patent assignee history
2012Patents assigned to ZEISS CARL SMS GMBH (1)· patent assignee history
2012Patents assigned to ZIBOLD AXEL (1)· patent assignee history
2012Based in Jena, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KIENZLE OLIVER | 1 | 2012 |
| KUSCHNERUS PETERself | 1 | 2012 |
| ZEISS CARL SMS GMBH | 1 | 2012 |
| ZIBOLD AXEL | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Jena, DE | 1 | 2012 |