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Inventor

Shuichi SUEMASA

Inventor
JP

Overview

3→
Patents
2022–2026
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
B08BCleaning in general25%
PatentTitleYear
12,594,583Substrate cleaning device, substrate processing device, and maintenance method for substrate cleaning device202611,837,482Substrate holding and rotation mechanism and substrate processing apparatus202311,524,322Jig for attaching and detaching cleaning member2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2026Patents assigned to EBARA CORP (3)· patent assignee history
2022–2026Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
EBARA CORP32022–2026
Locations
LocationPatentsSpan
JP32022–2026