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Inventor

Sharma V. Pamarthy

Inventor
Hayward, CA, US

Overview

9→
Patents
2003–2015
Patent span
Electricity
Primary field (CPC H)

Patents· 9 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
H01JElectric discharge tubes or discharge lamps23%
H01LSemiconductor devices14%
C23CCoating metallic material9%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems5%
C23FNon-mechanical removal of metallic material from surface5%
Y10TTechnical subjects covered by former us classification5%
PatentTitleYear
9,070,633'Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactor'20159,039,908'Post etch reactive plasma milling to smooth through substrate via sidewalls and other deeply etched features'20158,753,474'Method and apparatus for high efficiency gas dissociation in inductive couple plasma reactor'20148,475,625'Apparatus for etching high aspect ratio features'20138,158,522'Method of forming a deep trench in a substrate'20126,979,652'Etching multi-shaped openings in silicon'20056,905,616'Method of releasing devices from a substrate'20056,897,155'Method for etching high-aspect-ratio features'20056,593,244'Process for etching conductors at high etch rates'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003–2015Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2003–2015Based in Hayward, CA, US· patent location history
2012–2014Patents assigned to FARR JON C (2)· patent assignee history
2012–2014Patents assigned to PAMARTHY SHARMA V (2)· patent assignee history
2012–2015Based in Fremont, CA, US· patent location history
2013–2015Patents assigned to PAMARTHY SHARMA (2)· patent assignee history
2013Patents assigned to ABOOAMERI FARID (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
APPLIED MATERIALS INC92003–2015
FARR JON C22012–2014
PAMARTHY SHARMAself22013–2015
PAMARTHY SHARMA Vself22012–2014
ABOOAMERI FARID12013
Locations
LocationPatentsSpan
Hayward, California, US62003–2015
Fremont, California, US32012–2015