Inventor
WENBING YANG
Inventor
US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H01JElectric discharge tubes or discharge lamps16%
H01LSemiconductor devices16%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
H10NElectric solid-state devices not otherwise provided for10%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
B08BCleaning in general3%
C11DDetergent compositions3%
C23CCoating metallic material3%
C23FNon-mechanical removal of metallic material from surface3%
PatentTitleYear
12,510,826Photoresist development with halide chemistries202512,510,825Photoresist development with halide chemistries202512,417,902Method for cleaning a chamber202512,400,842Method of cleaning chamber components with metal etch residues202512,266,542Atomic layer etching for subtractive metal etch202512,256,645Chemical etch nonvolatile materials for MRAM patterning202512,105,422Photoresist development with halide chemistries202412,080,562Atomic layer etch and ion beam etch patterning202411,935,758Atomic layer etching for subtractive metal etch202411,450,513Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to LAM RES CORP (10)· patent assignee history
2022–2025Based in US· patent location history
2025Patents assigned to LAM RES CORPPORATION (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 10 | 2022–2025 |
| LAM RES CORPPORATION | 1 | 2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 10 | 2022–2025 |