Inventor
Walter Franken
Inventor
Eschweiler, DE
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material25%
H01LSemiconductor devices13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
B01DSeparation6%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry6%
B05CApparatus for applying fluent materials to surfaces, in general6%
B25JManipulators6%
F16JPistons6%
F16KValves6%
H01JElectric discharge tubes or discharge lamps6%
PatentTitleYear
10,822,701CVD or PVD reactor for coating large-area substrates20209,847,241Transport module for a semiconductor fabrication device or coupling device20179,045,818'Shadow mask held magnetically on a substrate support'20158,308,867'Device for the temperature control of the surface temperatures of substrates in a CVD reactor'20127,056,388'Reaction chamber with at least one HF feedthrough'20064,253,963'Asymmetrical ultrafiltration membrane on the basis of cellulose triacetate'1981Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1981Based in Bovenden, DE· patent location history
2006Patents assigned to AIXTRON AG (1)· patent assignee history
2006–2020Based in Eschweiler, DE· patent location history
2012–2015Patents assigned to FRANKEN WALTER (2)· patent assignee history
2012Patents assigned to AIXTRON INC (1)· patent assignee history
2015–2020Patents assigned to AIXTRON SE (3)· patent assignee history
2015Patents assigned to GERSDORFF MARKUS (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| AIXTRON SE | 3 | 2015–2020 |
| FRANKEN WALTERself | 2 | 2012–2015 |
| AIXTRON AG | 1 | 2006 |
| AIXTRON INC | 1 | 2012 |
| GERSDORFF MARKUS | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eschweiler, DE | 5 | 2006–2020 |
| Bovenden, DE | 1 | 1981 |